Osciladores basados en resonadores microelectromecánicos MEMS.

Abstract

In recent decades, the massification of electronics and advances in semiconductors have driven a constant race toward miniaturization and the integration of multiple devices and sensors on a single chip. However, as the scale of these systems decreases, the technical and economic challenges become increasingly complex, leading to the search for new techniques that enable both the development and manufacturing of increasingly smaller structures. This work focuses on one of these emerging techniques, known as Fab On a Chip, and in particular, on the optimization of one of its key components: a mass sensor based on a mechanical resonator whose variation in resonant frequency allows for highly accurate measurement of small variations in the amount of a deposited material. The main objective is to develop a self-sustaining closed-loop system that allows continuous monitoring of the sensor's resonant frequency, with the aim of integrating it into the manufacturing processes of micro- and nanoscopic-scale structures and devices. To achieve this, two fundamental circuits will be designed: a phase shifter, responsible for correcting the phase shift introduced by the sensor at resonance and by the different elements of the system, and a transimpedance amplifier capable of operating with signals in the tens of nanoampere range. In addition, optimization strategies will be implemented at each stage of the system, improving both signal processing and the codes used to autonomously control the different instruments.